Plasma cleaning

Diener Nano Barrel Asher, 13.5 MHz, Up to 150mm wafers.

  •  Gases O2, Ar, Air
  • Photoresist strip, descum, and pre spin cleaning

Tepla 400 Plasma Cleaner, Microwave plasma, samples up to 300mm diameter

  • Gases O2, Ar, Air
  • Pre Bond Cleaning, Die pad cleaning, Large parts cleaning