Physical Vapour Deposition

Lesker PVD 75 Sputter System

Edwards A500 Electron Beam Evaporator

Edwards A306 Box Chamber Thermal Evaporator, 6" wafer capacity

  • with 4 thermal sources

Edwards A306 Bell Jar Thermal Evaporator

  • with 4 thermal sources (Cr, Au & Au alloys only)

Edwards E306A  Bell Jar Thermal Evaporator

  • with 4 thermal sources
  • Metals available include Cr, Au, Ag, Ni, Al, Ti, Sn & Ge